Xpadder 6.2 [UPD]
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Indiranagar Mumbai Malad West End – Walmarts xpadder 6.2 Â· Results 1 – 10 of. Free Download xpadder 6.2 Free xpadder 6.2 For Windows Xpadder 6.2 For Windows – free download.1. Field of the Invention
The present invention relates to a laser processing apparatus for irradiating an object to be processed with a laser beam to process the object and particularly, the present invention relates to a laser processing apparatus for processing an object to be processed with a laser beam using a plurality of laser beams.
2. Description of the Related Art
A laser processing apparatus irradiates an object to be processed (for example, a semiconductor substrate (hereinafter, called “substrate”) such as a semiconductor wafer) with a laser beam to process the substrate. The laser processing apparatus is configured to process, for example, the substrate to be chamfered (a process that a chamfer is formed on the side face of an end portion of the substrate), form a trench in a surface of the substrate (a process that a trench is formed in the side face of the substrate), or form a groove in the surface of the substrate (a process that a groove is formed in the side face of the substrate).
A plurality of nozzles for discharging a laser beam (laser processing liquid) are arranged above a substrate in a laser processing apparatus. Therefore, the plurality of nozzles are arranged such that laser beams discharged from the nozzles are not in line with each other. In order to process the substrate using the laser beams not in line with each other, the plurality of nozzles are arranged at intervals in a radial direction of the substrate. The laser beams irradiated from the nozzles are reflected by the processed surface of the substrate. The laser beams reflected by the substrate are received by sensors. The laser beams are therefore measured by the sensors so as to be recognized the irradiation position of the laser beams on the substrate or the like.
The above-mentioned laser processing apparatus includes a laser oscillator for oscillating a laser beam. The laser oscillator irradiates the laser beam discharged therefrom to the substrate. The laser oscillator includes a substrate rotating mechanism that rotates the substrate. The laser oscillator is moved with respect to the center of rotation of the substrate. When the laser oscillator is moved, the laser processing liquid is supplied onto the substrate by a
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